Feedback loops with electrically-driven microcantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6589, Issue , 2007, Pages

  Malo, Javier ^a   Izpura, José Ignacio ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

Feedback; Microcantilever; Q enhancement; Resonance frequency shift; Thermal noise

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; ELECTROSTATIC DEVICES; PHASE CONTROL; SIGNAL PROCESSING; THERMAL NOISE;

FEEDBACK LOOPS; MICROCANTILEVERS; Q-ENHANCEMENT; RESONANCE FREQUENCY SHIFT;

MICROSYSTEMS;

EID: 36248953189     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.721349     Document Type: Conference Paper

References (18)

1. P.I. Oden, Gravimetrie sensing of metallic deposits using an end-loaded microfabricated beam structure, Sensors and Actuators B 53 (1998) 191-196.
2. A. Vidic, D. Then, Ch. Ziegler, A new cantilever system for gas and liquid sensing, Ultramicroscopy, 97 (2003) 407-416.
3. J. Tamayo, Study of the noise of micromechanical oscillators under quality factor enhancement via driving force control, J. Appl. Phys., 97, (2005) 044903-044913.
4. J. Olivares, J. Malo, S. González, E. Iborra, I. Izpura, M. Clement, A. Sanz-Hervás, J.L. Sánchez-Rojas, P. Sanz, Tunable mechanical resonator with aluminum nitride piezoelectric actuation, in: Proceedings of SPIE Vol. 6186, 2006, ISBN: 0-8194-6242-X
5. W. Han, S.M. Lindsay and T. Jing, A magnetically driven oscillating probe microscope for operation in liquids, Appl. Phys. Lett. 69 (1996) 4111-4113.
6. J. Malo, J.I. Izpura, Simultaneous magnetic and electrostatic driving of microcantilevers Sensors and Actuators A: Phys. (2006), doi: 10.1016/j.sna.2006.11.034
7. M.J. Cunnigham, D.F.L. Jenkins, M.A.Hj. Khalid, Cantilever vibration control by electrostatic actuation for magnetic force microscopy, Sensors and Actuators A, 63, (1997) 125-128.
8. S. Liang, D. Medich, D.M. Czajkowsky, S. Sheng, J.-Y. Yuan, Z. Shao, Thermal noise reduction of mechanical oscillators by actively controlled external dissipative forces, Ultramicroscopy, 84, (2000) 119-125.
9. A. Grant, L. McDonnell, A non-contact mode scanning force microscope optimised to image biological samples in liquid, Ultramicroscopy, 97, (2003) 177-184.
10. A. Mehta, S. Cherian, D. Hedden, T. Thundat, Manipulation and controlled amplification of Brownian motion of microcantilever sensors, Appl. Phys. Lett. 78, (2001) 1637-1639.
11. Z. Djuric, Mechanism of noise sources in microelectromechanical systems, Microelectron. Reliab., 40, (2000) 919-932.
12. H. Nyquist, Thermal agitation of electric charge in conductors, Phys. Rev. 32 (1928) 110-113.
13. C.D. Motchenbacher, F.C. Fitchen, Low-Noise Electronic Design, John Wiley & Sons, New York, 1973.
14. D.A. Bell, Noise and the Solid State, Pentech Press, London, 1985, (Chapter 8).
15. J.B. Johnson, Thermal agitation of electricity in conductors, Phys. Rev. 32 (1928) 97-109.
16. J.I. Izpura, 1/f electrical noise in planar resistors: the joint effect of a backgating noise and an instrumental disturbance, IEEE Trans. Instrum. Meas. (Accepted for publication).
17. http://www.veecoprobes.com/probe_detail.asp?ClassID=84.
18. J. Malo, J.I. Izpura, Distortion and control of feedback effects in microcantilevers, (To be published).