Optimization of a thermal flow sensor for acoustic particle velocity measurements

Journal of Microelectromechanical Systems

Volumn 14, Issue 3, 2005, Pages 436-443

  van Honschoten, Joost W ^a   Svetovoy, Vitaly B ^a   Krijnen, Gijs J M ^a   Elwenspoek, Miko C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC WAVE VELOCITY MEASUREMENT; BOUNDARY CONDITIONS; MICROPHONES; OPTIMIZATION; SENSORS; TEMPERATURE DISTRIBUTION;

ACOUSTIC PARTICLE VELOCITY MEASUREMENT; THERMAL FLOW SENSOR;

MICROELECTROMECHANICAL DEVICES;

EID: 22444431978     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.844848     Document Type: Article

References (29)

1. H.-E. de Bree, P. J. Leussink, M. T. Korthorst, H. V. Jansen, T. S. J. Lammerink, and M. C. Elwenspoek, "The microflown: a novel device measuring acoustical flows," Sens. Actuators A, vol. 54, pp. 552-557, 1996.
2. H.-E. de Bree, H.-E. Lammerink, H.-E. Elwenspoek, and H.-E. Fluitman, "Use of a fluid flow measuring device as a microphone and system comprising such a microphone," Patent PCT/NL95/00 220.
3. W. F. Druyvesteyn et al., "A new sound intensity probe; comparison to the Bruel & Kjaer p-p probe," J. Audio Eng. Soc., vol. 48, no. 1/2, 2000.
4. W. F. Druyvesteyn et al., A New Acoustic Measurement Probe; The Microflown. London, U.K.: IOA, 1999.
5. H.-E. de Bree et al., "Three-dimensional sound intensity measurements using microflown particle velocity sensors," in MEMS '99, Orlando, FL.
6. H.-E. de Bree et al., "Realization and calibration of a novel half inch p-u sound intensity probe," in 106th AES Munchen, 1999.
7. H. Schurer et al., "Comparison of two methods for measurement of horn input impedance," in Proc. 100th AES Convention, Copenhagen, Denmark, 1996.
8. F. J. M. van der Eerden et al., "Experiments with a new acoustic particle velocity sensor in an impedance tube," Sens. Actuators, vol. A69, pp. 126-133, 1998.
9. H.-E. de Bree et al., A method to measure apparent acoustic pressure, flow gradient and acoustic intensity using two micromachined flow microphones, in Eurosensors X, Leuven, Sweden, 1996.
10. H.-E. de Bree, "Add-on microflown for a high-end pressure gradient microphone," in Proc. 109th AES Convention, Los Angeles, CA, 2000.
11. H.-E. de Bree et al., "Bi-directional fast flow sensor with a large dynamic range," JMM, pp. 186-189, 1999.
12. C. Yang and H. Søeberg, "Monolithic flow sensor for measuring milliliter per minute flow," Sens. Actuators A, vol. 33, pp. 143-153, 1992.
13. K. Petersen et al., "High precision, high performance mass-flow sensor with integrated laminar flow micro-channels," Sens. Actuators, pp. 361-363, 1985.
14. G. B. Hocker, "A microtransducer for air flow and differential pressure sensing applications," Micromach. Micropack. Transducers, pp. 207-214, 1985.
15. R. G. Johnson et al., "A highly sensitive silicon chip microtransducer for air flow and differential pressure applications," Sens. Actuators, vol. 11, pp. 63-72, 1987.
16. V. B. Svetovoy and I. A. Winter, "Model of the μ-flown microphone," Sens. Actuators, vol. 86, pp. 171-181, 2001.
17. J. W. van Honschoten, G. J. M. Krijnen, V. B. Svetovoy, H.-E. de Bree, and M. C. Elwenspoek, "Optimization of a two-wire thermal sensor for flow and sound measurements," in Proc. MEMS, Switzerland, 2001.
18. J. W. van Honschoten, G. J. M. Krijnen, V. B. Svetovoy, H.-E. de Bree, and M. Elwenspoek, "Analytic model of a two-wire thermal sensor for flow and sound measurements," J. Micromechanics, 2004.
19. A. D. Pierce, Acoustics: An Introduction to Its Physical Principles and Applications. Woodbury, NY: Acoust. Soc. America, 1989.
20. M. S. Howe, Acoustics of Fluid - Structure Interactions. Cambridge, U.K.: Cambridge University Press, 1998.
21. R. K. Pathria, Statistical Mechanics, Canada: Univ. Waterloo, 1986.
22. A. van der Ziel, Noise, Prentice-Hall Electrical Engineering Series, The Netherlands.
23. P. Dutta and P. M. Horn, "Low-frequency fluctuations in solids: 1/f noise," Rev. Modern Phys., vol. 53, no. 3, 1981.
24. a noise in dissipative transport," Phys. Rev. A, vol. 45, no. 2, 1992.
25. S. H. Liu, "Theory of 1/f noise in metal films and whiskers," Phys. Rev. B, vol. 16, no. 10, 1977.
26. J. H. Scofield, J. V. Mantese, and W. W. Webb, "1/f noise of metals: A case for extrinsic origin," Phys. Rev. B, vol. 32, no. 2, 1985.
27. E. Milotti, "Linear processes that produce 1/f or flicker noise," Phys. Rev. E, vol. 51, no. 4, 1995.
28. M. B. Weissman, "1/f noise and other slow, nonexponential kinetics in condensed matter," Rev. Modern Phys., vol. 60, no. 2, 1988.
29. J. P. Holman, Heat Transfer, 9th ed: McGregor and Emery, 2002.