Novel spin-on carbon hard mask with hardening by ion implantation

Journal of Photopolymer Science and Technology

Volumn 20, Issue 3, 2007, Pages 365-372

  Ishibashi, Takeo ^a   Ono, Yoshiharu ^a   Yamaguchi, Atsumi ^a   Ogawa, Sachiko ^a   Hanawa, Tetsuro ^a   Shinohara, Masaaki ^a   Tadokoro, Masahiro ^a   Yonekura, Kazumasa ^a   Mitarai, Yuko ^b   Matsuda, Keiko ^c   Hirori, Hideki ^c   Miyamoto, Takashi ^c   Matsunobe, Takeshi ^c  

^a RENESAS TECHNOLOGY CORP   (Japan)

^b Renesas Design Corporation   (Japan)

^c TORAY RESEARCH CENTER INC   (Japan)

Author keywords

Amorphous carbon; Ion implantation; Multi layer resist; Spin on carbon

Indexed keywords

EID: 36148991900     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.20.365     Document Type: Article

References (12)

1. J. Hah, Y. Chae, Y. Jang, M. Ryoo, S. Choi, S. Woo, H. Cho and J. Moon, Proceedings of SPIE, 6153, (2006) 61530L.
2. V. Sipani, Y. Hishiro and M. Abatchev, Proceedings of SPIE, 6153, (2006) 61532U.
3. K. Lee, S. Kim, G. Lee, S. Lee, J. Cho, W. Kim, C. Bok, H. Kim, S. Moon and J. Kim, Proceedings of SPIE, 6153, (2006) 61532V.
4. K. Lee, G. Lee, S. Kim, S. Lee, J. Cho, W. Kim, C. Bok, S. Moon and J. Kim, J. Photopolymer Sci. Technol., 19, (2006) 323.
5. J. Abe, H. Hayashi, Y. Taniguchi, H. Kato, Y. Onishi, I. Sakai and T. Ohiwa, 2005 Proceedings of Symposium Dry Process, (2005) 12.
6. K. Yonekura, K. Yoshikawa, Y. Fujiwara, S. Sakamori, N. Fujiwara, T. Kosaka, M. Ohkuni and K. Tateiwa, Thin Solid Films, 2006, doi:10.1016/j.tsf.2006.10.037
7. M. Tadokoro, K. Yonekura, K. Yoshikawa, Y. Ono, T. Ishibashi, T. Hanawa, H. Okumura, T. Matsunobe and K. Matsuda, 2006 Proceedings of Symposium Dry Process, (2006) 183.
8. Y. Ono, T. Ishibashi, A. Yamaguchi, T. Hanawa, M. Tadokoro, K. Yoshikawa, K. Yonekura, K. Matsuda, T. Matsunobe, Y Fujii and T. Tanaka, Proceedings of SPIE, (2007) 6519-106V.
9. A. Yamaguchi, A. Nakae and K. Tsujita, Proceedings of SPIE, 4345, (2001) 655.
10. The Stopping and Range of Ions in Matter (SRIM2006), Computer Software. J. F. Ziegler and J. P. Biersack, (2006).
11. J. F. Ziegler, "Tutorial #2 on Damage", http://www.srim.org/SRIM/Tutorials/SRIM%20Tutorial-2%20-%20Damage.pdf.
12. J. F. Ziegler, J. Appl. Phys/Rev. Appl. Phys., 85, (1999) 1249.