Nanostructured SiC by chemical vapor deposition and nanoparticle impaction

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 871-875

  Beaber, A R ^a   Qi, L J ^a   Hafiz, J ^b   McMurry, P H ^b   Heberlein, J V R ^b   Gerberich, W W ^a   Girshick, S L ^b  

^a UNIVERSITY OF MINNESOTA   (United States)

^b University of Minnesota   (United States)

Author keywords

Hard coatings; Hypersonic plasma particle deposition; Nanocomposite

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; FRACTURE TOUGHNESS; HARD COATINGS; HARDNESS; INDENTATION; NANOPARTICLES; NANOSTRUCTURED MATERIALS; SYNTHESIS (CHEMICAL);

INDENTATION MODULI; REACTANT CONCENTRATION;

SILICON CARBIDE;

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; FRACTURE TOUGHNESS; HARD COATINGS; HARDNESS; INDENTATION; NANOPARTICLES; NANOSTRUCTURED MATERIALS; SILICON CARBIDE; SYNTHESIS (CHEMICAL);

EID: 36049048344     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.05.065     Document Type: Article

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