Preparation of BaZrO3 films by physical vapor deposition and a novel hydrothermal duplex technique

Thin Solid Films

Volumn 516, Issue 2-4, 2007, Pages 364-368

  Teng, Huan Ping ^a   Chieh, Yu Chih ^a   Lu, Fu Hsing ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

(BaZrO3); Barium zirconate; Galvanic couple; Hydrothermal; PVD; Thin films; ZrN

Indexed keywords

ALKALINITY; BARIUM COMPOUNDS; HYDROTHERMAL SYNTHESIS; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

BARIUM ZIRCONATE; DIELECTRIC BARIUM ZIRCONATE; GALVANIC COUPLE;

THIN FILMS;

EID: 36049043758     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.166     Document Type: Article

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