Hydrothermal and electrochemical growth of complex oxide thin films for electronic devices

Journal of the European Ceramic Society

Volumn 26, Issue 4-5, 2006, Pages 605-611

  Kajiyoshi, Koji ^a   Yanagisawa, Kazumichi ^a   Yoshimura, Masahiro ^b  

^a KOCHI UNIVERSITY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

BaTiO3 and titanates; Dielectric properties; Films; Niobates; Tantalates

Indexed keywords

BARIUM TITANATE; DIELECTRIC PROPERTIES; ELECTROCHEMISTRY; ELECTRON DEVICES; FILM GROWTH; HYDROTHERMAL SYNTHESIS; INTERFACES (MATERIALS); THIN FILMS;

ELECTROCHEMICAL GROWTH; NIOBATES; TANTALATES;

OXIDES;

CERAMICS;

EID: 29944446691     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2005.07.022     Document Type: Article

References (11)

1. 3 by evaporation Rev. Sci. Inst. 26 5 1955 463-466
2. Y.Y. Tomashpolski Structure studies of ferroelectric vacuum deposits Ferroelectrics 7 1974 253-255
3. I.H. Pratt Characteristics of RF sputtered barium titanate thin films Proc. IEEE 59 10 1971 1440-1447
4. 3 thin-film capacitor on silicon Appl. Phys. Lett. 57 23 1990 2431-2433
5. W.A. Feil B.W. Wessels L.M. Tonge and T.J. Marks Organometallic chemical vapor deposition of strontium titanate J. Appl. Phys. 67 8 1990 3858-3861
6. 3 thin films by pulsed-laser deposition Thin Solid Films 227 1993 100-104
7. 3 thin film by hydrothermal electrochemical method Jpn. J. Appl. Phys. 28 2 1989 L2007-L2009
8. K. Kajiyoshi N. Ishizawa and M. Yoshimura Preparation of tetragonal barium titanate thin film on titanium metal substrate by hydrothermal method J. Am. Ceram. Soc. 74 2 1991 369-374
9. 3 substrates under hydrothermal conditions Jpn. J. Appl. Phys. 30 1B 1991 L120-L123
10. 3(A=Ba, Sr) thin films by the hydrothermal-electrochemical method In Preprints of the 14th Fall Meeting of the Ceramic Society of Japan Tokyo, Sep. 26-28 2001 281
11. K. Kajiyoshi R. Ike A. Onda and K. Yanagisawa Hydrothermal syntheses of potassium tantalate niobate thin films In Preprints of the 2003 Annual Meeting of the Ceramic Society of Japan Tokyo, March 22-24 2003 48