Atmospheric pressure remote plasma ashing of photoresist using pin-to-plate dielectric barrier discharge

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 46, Issue 36-40, 2007, Pages

  Park, Jaebeom ^a   Kyung, Sejin ^a   Yeom, Geunyoung ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

DBD; Glow discharge; N2 O 2 SF6 gas mixture; PR ashing; Remote type atmospheric pressure plasma

Indexed keywords

DIELECTRIC MATERIALS; GLOW DISCHARGES; NITROGEN OXIDES; PLASMAS; SULFUR HEXAFLUORIDE;

ATMOSPHERIC PRESSURE PLASMA; DIELECTRIC BARRIER DISCHARGE; PLASMA ASHING;

PHOTORESISTS;

EID: 36049008376     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.L942     Document Type: Article

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