Effects of annealing atmosphere on the optoelectrical properties of ZnO thin films grown by atomic layer deposition

Materials Science Forum

Volumn 510-511, Issue , 2006, Pages 670-673

  Lee, Chongmu ^a   Park, Yeonkyu ^a   Park, Anna ^a   Kim, Choongmo ^a  

^a Inha University   (South Korea)

Author keywords

Annealing, photoluminescence; Crystallinity; Electrical properties; ZnO

Indexed keywords

ANNEALING; CRYSTALLIZATION KINETICS; ELECTRIC PROPERTIES; OPTOELECTRONIC DEVICES; PHOTOLUMINESCENCE; ZINC OXIDE;

ANNEALING ATMOSPHERE; OPTOELECTRICAL PROPERTIES; OXYGEN ATMOSPHERE; UNDOPED FILMS;

FILM GROWTH;

EID: 35748980886     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-995-4.670     Document Type: Conference Paper

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