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Volumn 517, Issue , 2006, Pages 232-236
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Fabrication and characterization of uniform quantum size porous silicon
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Author keywords
Infrared spectroscopy; Porous silicon; Surface passivation
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Indexed keywords
ETCHING;
INFRARED SPECTROSCOPY;
MICROSTRUCTURE;
PASSIVATION;
QUANTUM CONFINEMENT;
SURFACE PROPERTIES;
ETCHING BATH;
HIGH ETCHING CURRENTS;
QUANTUM SIZE POROUS SILICON;
SURFACE PASSIVATION;
POROUS SILICON;
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EID: 35748974516
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/0-87849-404-9.232 Document Type: Conference Paper |
Times cited : (5)
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References (13)
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