TEM and DFT investigation of CVD TiN/κ-Al2O3 multilayer coatings

Surface and Coatings Technology

Volumn 202, Issue 3, 2007, Pages 522-531

  Canovic, S ^a   Ruppi, S ^b   Rohrer, J ^a   Vojvodic, A ^a   Ruberto, C ^a   Hyldgaard, P ^a   Halvarsson, M ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b SECO TOOLS AB   (Sweden)

Author keywords

Al2O3; Al203; CBED; DFT; FIB SEM; HREM; Orientation relationship; TiN

Indexed keywords

ADSORPTION; ALUMINA; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; LATTICE MISMATCH; TITANIUM NITRIDE;

CUBE-ON-CUBE ORIENTATION; INTERFACIAL STRUCTURE;

MULTILAYERS;

ADSORPTION; ALUMINA; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; LATTICE MISMATCH; MULTILAYERS; TITANIUM NITRIDE;

EID: 35648977695     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.06.022     Document Type: Article

References (45)

1. Chatfield C., Lindström J.N., and Sjöstrand M.E. J. Phys. C5 (1989) 377
2. Colombier C., and Lux B. J. Mater. Sci. 24 (1989) 462
3. Funk R., Schachner H., Triquet C., Kornmann M., and Lux B. J. Electrochem. Soc. 123 2 (1976) 285
4. Vuorinen S., and Skogsmo J. Thin Solid Films 193-194 (1990) 536
5. Lux B., Colombier C., Altena H., and Stjernberg K. Thin Solid Films 138 (1986) 49
6. Vuorinen S., and Skogsmo J. In: Sudarshan T., and Bhat D. (Eds). Surface Modification Technologies (1988), TMS, Phoenix, AZ 143
7. Halvarsson M., Nordén H., and Vuorinen S. Surf. Coat. Technol. 61 (1993) 177
8. Sjöstrand M.E. In: Sedgwick T.O., and Lytdin H. (Eds). Proc. 7th Int. Conf. on CVD (1979), The Electrochemical Society, Pennington, NJ 452
9. Halvarsson M., and Vuorinen S. Int. J. Refract. Met. Hard Mater. 15 (1997) 169
10. Ruppi S., and Larsson A. Thin Solid Films 388 1-2 (2000) 50
11. Larsson A., and Ruppi S. Int. J. Refract. Met. Hard Mater. 19 4-6 (2001) 515
12. S. Ruppi, U.S. Patent 5137774, (1992).
13. Vuorinen S., and Skogsmo J. Thin Solid Films 193-194 (1990) 536
14. Stumpf H.C., Russel A.S., Newsome J.W., and Tucker C.M. Ind. Eng. Chem. 42 7 (1950) 1398
15. Dragoo A.L., and Diamond J.J. J. Am. Chem. Soc. 50 11 (1967) 568
16. Levin I., and Brandon D. J. Am. Ceram. Soc. 81 8 (1998) 1995
17. Okumiya M., Yamaguchi G., Yamada O., and Ono S. Bull. Chem. Soc. Jpn. 44 2 (1971) 418
18. Vuorinen S., and Karlsson L. Thin Solid Films 214 (1992) 132
19. Skogsmo J., Halvarsson M., and Vuorinen S. Surf. Coat. Technol. 54-55 (1992) 186
20. Lindulf N., Halvarsson M., Nordén H., and Vuorinen S. Thin Solid Films 253 (1994) 311
21. Halvarsson M., Trancik J.E., and Ruppi S. Int. J. Refract. Met. Hard Mater. 24 (2006) 32
22. Berne C., Halvarsson M., Larsson A., and Ruppi S. In: Koiwa M., Otsuka K., and Miyazaki T. (Eds). International Conference on Solid-Solid Phase Transformations '99 (JIMIC-3) Kyoto, Japan (1999), The Japan Institute of Metals 1321
23. Halvarsson M., Larsson A., and Ruppi S. Micron 32 (2001) 807
24. Ruberto C., and Lundqvist B.I. Phys. Rev., B 75 (2007) 235438
25. Ruberto C., Vojvodic A., and Lundqvist B.I. Solid State Commun. 141 (2007) 48
26. Vojvodic A., Ruberto C., and Lundqvist B.I. Surf. Sci. 600 (2006) 3619
27. Ruberto C., Vojvodic A., and Lundqvist B.I. Surf. Sci. 600 (2006) 1612
28. Ruberto C., Halvarsson M., and Ruppi S. In: Hanada S., Zhong Z., Nam S.W., and Wright R.N. (Eds). The 4th Pacific Rim International Conference on Advanced Materials and Processing (PRICM4) (2001), The Japan Institute of Metals 683
29. Kronberg M.L. Acta Metall. 5 (1957) 507
30. Lippens B., and Boer J.D. Acta Crystallogr. 17 (1964) 1312
31. Zhou R., and Snyder R. Acta Crystallogr. B47 (1991) 617
32. Liu P., and Skogsmo J. Acta Crystallogr. B47 (1991) 425
33. Yourdshahyan Y., Ruberto C., Halvarsson M., Bengtsson L., Langer V., Lundqvist B., Ruppi S., and Rolander U. J. Am. Ceram. Soc. 82 6 (1999) 1365
34. Gross H.-L., and Mader W. Chem. Commun. 55 (1997)
35. Ollivier B., Retoux R., Lacorre P., Massiot D., and Férey G. J. Mater. Chem. 7 6 (1997) 1049
36. Pierson H.O. Handbook of refractory carbides and nitrides (1996), Noyes Publications, New Jersey, USA
37. http://www.camp.dtu.dk/campos.
38. Perdew J.P., Chevary J.A., Vosko S.H., Jackson K.A., Pederson M.R., Singh D.J., and Fiolhais C. Phys. Rev., B 46 (1992) 6671
39. Vanderbilt D. Phys. Rev., B 41 (1990) 7892
40. Aono M., Oshima C., Zaima S., Otani S., and Ishizawa Y. Jpn. J. Appl. Phys. 20 L829 (1981)
41. Zaima S., Shibata Y., Adachi H., Oshima C., Otani S., Aono M., and Ishizawa Y. Surf. Sci. 157 (1985) 380
42. Gall D., Kodambaka S., Wall M.A., Petrov I., and Greene J.E. J. Appl. Phys. 93 (2003) 9086
43. Halvarsson M., Langer V., and Vuorinen S. Surf. Coat. Technol. 76-77 (1995) 358
44. Campbell W.J., and Grain C. US Department of the Interior, Bureau of Mines (1961)
45. 3, Ph.D. Thesis (Chalmers University of Technology and Göteborg University, Göteborg, Sweden 2001).