The microstructure of CVD κ-Al2O3 multilayers separated by thin intermediate TiN or TiC layers

International Journal of Refractory Metals and Hard Materials

Volumn 24, Issue 1-2, 2006, Pages 32-38

  Halvarsson, M ^a   Trancik, J E ^a   Ruppi, S ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Research and Development   (Sweden)

Author keywords

CVD; Epitaxy; Porosity; Stability; TEM

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; EPITAXIAL GROWTH; MICROSTRUCTURE; MULTILAYERS; POROSITY; THERMODYNAMIC STABILITY;

ALUMINA LAYERS; MULTILAYER COATINGS; PORE DENSITY;

ALUMINUM COMPOUNDS;

EID: 27144440079     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijrmhm.2005.06.007     Document Type: Article

References (29)

1. 3 J Phys C5 1989 377 387
2. 3 on cemented carbides by chemical vapour deposition J Mater Sci 24 1989 462 470
3. R. Funk, H. Schachner, C. Triquet, M. Kornmann, and B. Lux Coating of cemented carbide cutting tools with alumina by chemical vapor deposition J Electrochem Soc 123 2 1976 285 289
4. 3and α-κ multioxide coatings on cemented carbide Thin Solid Films 193-194 1990 536 546
5. B. Lux, C. Colombier, H. Altena, and K. Stjernberg Preparation of alumina coatings by chemical vapour deposition Thin Solid Films 138 1986 49 64
6. S. Vuorinen, and J. Skogsmo Microstructural characterization of wear resistant coatings T. Sudarshan D. Bhat Surface modification technologies 1988 Phoenix AZ, TMS 143 168
7. 3 multilayer coatings Surf Coat Technol 61 1993 177 181
8. 2 H. Lytdin Proceedings of the 7th international conference on CVD, Sedgwick TO 1979 The Electrochemical Society Pennington, NJ 452 459
9. 3 J Electrochem Soc 130 7 1983 1607 1611
10. 3 by convergent-beam electron diffraction Acta Crystallograph B47 1991 425 433
11. 3 J Am Ceram Soc 82 6 1999 1365 1380
12. H.-L. Gross, and W. Mader On the crystal structure of κ-alumina Chem Commun 1997 55 56
13. B. Ollivier, R. Retoux, P. Lacorre, D. Massiot, and G. Férey Crystal structure of κ-alumina: an X-ray powder diffraction, TEM and NMR study J Mater Chem 7 6 1997 1049 1056
14. 3 Thin Solid Films 388 1-2 2000 50 61
15. 3 coatings Int J Refract Met Hard Mater 19 4-6 2001 515 522
16. 3 multilayers separated by thin intermediate TiN or TiC layers M. Koiwa K. Otsuka T. Miyazaki International conference on solid-solid phase transformations '99 (JIMIC-3) Kyoto, Japan 1999 The Japan Institute of Metals 1321 1324
17. Ruppi S. U.S. Patent 5137774, 1992.
18. M. Halvarsson, H. Nordén, and S. Vuorinen The microstructure of bonding layers for CVD alumina coatings Surf Coat Technol 68-69 1994 266 273
19. 3and α-κ multioxide coatings on cemented carbide Thin Solid Films 193-194 1990 536 546
20. 3/TiC multilayer coatings Micron 32 2001 807 815
21. 3 multilayer coatings on cemented carbides Int J Refract Met Hard Mater 15 1997 169 178
22. H.C. Stumpf, A.S. Russel, J.W. Newsome, and C.M. Tucker Thermal transformation of aluminas and alumina hydrates Ind Eng Chem 42 7 1950 1398 1403
23. A.L. Dragoo, and J.J. Diamond Transitions in vapor-deposited alumina from 300 °C to 1200 °C J Am Chem Soc 50 11 1967 568 574
24. I. Levin, and D. Brandon Metastable alumina polymorphs: crystal structures and transition sequences J Am Ceram Soc 81 8 1998 1995 2012
25. 2O Bull Chem Soc Jpn 44 2 1971 418 423
26. S. Vuorinen, and L. Karlsson Phase transformation in chemical vapour-deposited κ-alumina Thin Solid Films 214 1992 132 143 Phase transformation in chemical vapour-deposited k-alumina
27. 3 Surf Coat Technol 54-55 1992 186 192
28. 3 Thin Solid Films 253 1994 311 317
29. C. Ruberto, M. Halvarsson, and S. Ruppi Interfacial structure of CVD TiC/alumina multilayers S. Hanada Z. Zhong S.W. Nam R.N. Wright The 4th pacific rim international conference on advanced materials and processing (PRICM4) 2001 The Japan Institute of Metals 683 686