Ge film growth in the presence of Sb by metal organic chemical vapor deposition

Journal of Applied Physics

Volumn 102, Issue 8, 2007, Pages

  Kim, Ran Young ^a   Kim, Ho Gi ^a   Yoon, Soon Gil ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Chungnam National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY; ELECTRODES; FILM GROWTH; ORGANIC CHEMICALS; PYROLYSIS; SURFACE REACTIONS; THERMAL EFFECTS;

BUBBLING TEMPERATURE; GERMANIUM FILMS; SUBSTRATE TEMPERATURE;

CHEMICAL VAPOR DEPOSITION;

EID: 35648960287     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2795673     Document Type: Article

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