Deterministic design of binary phase-only blazed grating with subwavelength features under limitation on spatial resolution of fabrication technique

Applied Optics

Volumn 46, Issue 22, 2007, Pages 5019-5026

  Oonishi, Takehito ^a   Konishi, Tsuyoshi ^a   Itoh, Kazuyoshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; MICROSTRUCTURE; OPTICAL RESOLVING POWER; PHASE MODULATION; STATISTICAL METHODS;

BINARY GRATING; BLAZED GRATING; SPATIAL RESOLUTION; SUBWAVELENGTH STRUCTURES;

DIFFRACTION GRATINGS;

EID: 35448992883     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.005019     Document Type: Article

References (16)

1. T. J. Suleski and R. D. Te Kolste, "Fabrication trends for free-space microoptics," J. Lightwave Technol. 23, 633-646 (2005).
2. H. Kikuta, H. Toyota, and W. Yu, "Optical elements with subwavelength structure surface," Opt. Rev. 10, 63-73 (2003).
3. D. C. Flanders, "Submicrometer periodicity grating as artificial anisotropic dielectrics," Appl. Phys. Lett. 42, 492-494 (1983).
4. H. Kikuta, Y. Ohira, H. Kubo, and K. Iwata, "Effective medium theory of two-dimensional subwavelength gratings in the non-quasi-static limit," J. Opt. Soc. Am. A 15, 1577-1585 (1998).
5. W. Yu, K. Takahara, T. Konishi, T. Yotsuya, and Y. Ichioka, "Fabrication of multilevel phase computer-generated hologram elements based on effective medium theory," Appl. Opt. 39, 3531-3536 (2000).
6. J. N. Mait, D. W. Prather, and M. S. Mirotznik, "Design of binary subwavelength diffractive lenses by use of zeroth-order effective medium theory," J. Opt. Soc. Am. A 16, 1157-1167 (1999).
7. J. N. Mait, A. Scherer, O. Dial, D. W. Prather, and X. Gao, "Diffractive lens fabricated with binary features less than 60 nm," Opt. Lett. 25, 381-383 (2000).
8. J. M. Miller, N. de Beaucoudrey, P. Chavel, E. Cambril, and H. Launois, "Synthesis of a subwavelength-pulse-width spatially modulated array illuminator for 0.633 μm," Opt. Lett. 21, 1399-1401 (1996).
9. L. Vaissié, O. V. Smolski, A. Mehta, and E. G. Johnson, "High efficiency surface-emitting laser with subwavelength antireflection structure," IEEE Photon. Technol. Lett. 17, 732-734 (2005).
10. P. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, "Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings," Opt. Lett. 23, 1081-1083 (1998).
11. J. R. Wendt, G. A. Vawter, R. E. Smith, and M. E. Warren, "Nanofabrication of subwavelength, binary, high-efficiency diffractive optical elements in GaAs," J. Vac. Sci. Technol. B 13, 2705-2708 (1995).
12. E. Noponen and J. Turunen, "Binary high-frequency-carrier diffractive optical elements: electromagnetic theory," J. Opt. Soc. Am. A 11, 1097-1109 (1994).
13. Z. Zhou and T. J. Drabik, "Optimized binary, phase-only, diffractive optical element with subwavelength features for 1.55 μm," J. Opt. Soc. Am. A 12, 1104-1112 (1995).
14. S. Astilean, P. Lalanne, P. Chavel, E. Cambril, and H. Launois, "High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 μm," Opt. Lett. 23, 552-554 (1998).
15. G. Mur, "Absorbing boundary conditions for the finite-difference approximation of the time-domain electromagnetic-field equation," IEEE Trans. Electromagn. Compat. 23, 377-382 (1981).
16. M. W. Farn, "Binary grating with increased efficiency," Appl. Opt. 31, 4453-4458 (1992).