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Optics Letters

Volumn 21, Issue 17, 1996, Pages 1399-1401

Synthesis of a subwavelength-pulse-width spatially modulated array illuminator for 0.633 μm

(5) Miller, J Michael a,b De Beaucoudrey, Nicole a Chavel, Pierre a Cambril, Edmond a Launois, Huguette a

a CNRS (France)

b MCGILL UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; DIFFRACTION; ELECTROMAGNETIC FIELD THEORY; ELECTRON BEAM LITHOGRAPHY; FABRICATION; FOURIER TRANSFORMS; HELIUM NEON LASERS; POLYMETHYL METHACRYLATES; PULSE WIDTH MODULATION; REACTIVE ION ETCHING;

BINARY CARRIER GRATING; DIFFRACTION THEORY; ELECTRON BEAM WRITING; FILL FACTOR; FRESNEL LOSSES; SPATIALLY DIFFRACTIVE ARRAY ILLUMINATOR;

OPTICAL DEVICES;

EID: 0030241031 PISSN: 01469592 EISSN: None Source Type: Journal
DOI: 10.1364/OL.21.001399 Document Type: Article

Times cited : (26)

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