Carbon nanopillar array deposition on SiO2 by ion irradiation through a porous alumina template

Vacuum

Volumn 82, Issue 3, 2007, Pages 359-362

  Skupinski M ^a   Johansson, A ^a   Jarmar, T ^a   Razpet, A ^b   Hjort, K ^a   Boman, M ^a   Possnert, G ^a   Jensen, J ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Anodic porous alumina membrane; Carbon nanostructures; Carbon pillars; Ion irradiation; Ion lithography; SiO2

Indexed keywords

ALUMINA; CARBON; DEPOSITION; ION BEAM LITHOGRAPHY; ION BOMBARDMENT; POROUS MATERIALS;

ANODIC POROUS ALUMINA MEMBRANES; CARBON NANOPILLAR ARRAYS; POROUS ALUMINA TEMPLATES;

SILICA;

EID: 35448946781     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.05.002     Document Type: Article

References (21)

1. Iijima S. Nature 354 (1991) 56
2. Dresselhaus M.S., Dresselhaus G., and Avouris P. Carbon nanotubes: synthesis, structure, properties, and applications (2001), Springer, Heidelberg
3. Bhushan B. Editor. Handbook of nanotechnology (2004), Springer, Berlin
4. Gao H., Mu C., Wang F., Xu D., Wu K., Xie Y., et al. J Appl Phys 93 (2003) 5602
5. Kabir M.S., Morjan R.E., Nerushev O.A., Lundgren P., Bengtsson S., Enokson P., et al. Nanotechnology 16 (2005) 458
6. Masuda H., and Fukuda K. Science 268 (1995) 1466
7. Almawlawi D., Bosnick K.A., Osika A., and Moskovits M. Adv Mater 12 (2000) 1252
8. Matsuura N., Simpson T.W., Mitchell I.V., Mei X.Y., Morales P., and Ruda H.E. Appl Phys Lett 81 (2002) 4826
9. Rehn L.E., Kestel B.J., Baldo P.M., Hiller J., McCormick A.W., and Birtcher R.C. Nucl Instrum Methods B 206 (2003) 490
10. Razpet A., Johansson A., Possnert G., Skupinski M., and Hjort K. J Appl Phys 97 (2005) 044310
11. Sanz R., Johansson A., Skupinski M., Jensen J., Possnert G., Boman M., et al. Nano Lett 6 (2006) 1065
12. Zhang X.Y., Zhang L.D., Li G.H., and Zhao L.X. Mater Sci Eng A 308 (2001) 9
13. Kim J.M., Choi J.H., Park J.B., Kim S.K., Yoo J.B., and Park C.Y. Thin Solid Films 435 (2003) 312
14. Liu X.W., Hsieh W.J., and Shih H.C. Diamond Relat Mater 11 (2002) 1193
15. Rahman S., and Yang Y. Nano Lett 3 (2003) 439
16. Li J., Papadopoulos C., Xua J.M., and Moskovits M. Appl Phys Lett 75 (1999) 367
17. Razpet A., Possnert G., Johansson A., Hallen A., and Hjort K. Nucl Instrum Methods B 222 (2004) 593
18. Skupinski M, Jensen J, Johanssen A, Possnert G, Boman M, Hjort K, et al. J Vac Sci Technol B 2007;25:862.
19. Tesmer J.R., and Nastasi M. editors. Handbook of modern ion beam material analysis (1995), Material Research Society, New York
20. Kim N.S., Lee Y.T., Park T., Ryu H., Lee J., Choi S.Y., et al. J Phys Chem B 106 (2002) 9286
21. Lee S.Y., Yamada M., and Miyake M. Carbon 43 (2005) 2654