Synthesis of HDLC films from solid carbon

Journal of Materials Science

Volumn 39, Issue 10, 2004, Pages 3309-3318

  Mills, R L ^a   Sankar, J ^a   Ray, P ^a   Voigt, A ^a   He, J ^a   Dhandapani, B ^a  

^a BlackLight Power Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; EXTRACTION; HYDROGEN; PLASMAS; RAMAN SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRONIC DEVICES; HIGH DUCTILITY; SILICON SUBSTRATES; SOLID CARBON;

DIAMOND LIKE CARBON FILMS;

EID: 3543064231     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:JMSC.0000026931.98685.59     Document Type: Article

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