Spectroscopic characterization of the atomic hydrogen energies and densities and carbon species during helium-hydrogen-methane plasma CVD synthesis of diamond films

Chemistry of Materials

Volumn 15, Issue 6, 2003, Pages 1313-1321

  Mills, Randell ^a   Sankar, Jayasree ^a   Ray, Paresh ^a   Dhandapani, Bala ^a   He, Jiliang ^a  

^a BlackLight Power Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND SEEDING;

CARBON; DIAMOND FILMS; HYDROGEN; MIXTURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

POLYCRYSTALLINE MATERIALS;

CARBON; DIAMOND; HELIUM; HYDROGEN; METHANE;

ARTICLE; CATALYSIS; CATALYST; CHEMICAL REACTION; DENSITY; ENERGY; FILM; MASS SPECTROMETRY; MEASUREMENT; RAMAN SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; SURFACE PROPERTY; TECHNIQUE; VAPOR; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0037466009     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm020817m     Document Type: Article

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