Silicon loss metrology using synchrotron x-ray reflectance and Bragg diffraction

AIP Conference Proceedings

Volumn 931, Issue , 2007, Pages 196-200

  Bhargava, Mansi ^a   Donner, Wolfgang ^b   Srivastava, Aseem ^c   Wolfe, John C ^a  

^a UNIVERSITY OF HOUSTON   (United States)

^b University of Houston   (United States)

^c AXCELIS TECHNOLOGIES   (United States)

Author keywords

Bragg diffraction; Laue oscillations; Plasma oxidation; Silicon loss; Silicon on insulator; X ray reflectance

Indexed keywords

EID: 35348833505     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2799369     Document Type: Conference Paper

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