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Volumn , Issue , 2007, Pages 1855-1860
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RF characterisation and process control for passive integration components
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITORS;
IMPACT TESTING;
INTEGRATION;
MIM DEVICES;
OHMIC CONTACTS;
POWER AMPLIFIERS;
DECOUPLING CAPACITOR;
STACKED POWER AMPLIFIER;
THROUGH WAFER INTERCONNECT (TWI);
PROCESS CONTROL;
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EID: 35348814880
PISSN: 05695503
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ECTC.2007.374050 Document Type: Conference Paper |
Times cited : (3)
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References (8)
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