XPS analysis of WxCy thin films prepared by sputter deposition

Vacuum

Volumn 82, Issue 2 SPEC. ISS., 2007, Pages 150-153

  Kovac J ^a   Panjan, P ^a   Zalar, A ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Hard coatings; Tungsten carbide; W a C

Indexed keywords

CONCENTRATION (PROCESS); HARD COATINGS; SPUTTERING; TUNGSTEN CARBIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA BEAM SPUTTERING TECHNIQUE; THIN-FILM COMPOSITION;

THIN FILMS;

EID: 35248821270     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.032     Document Type: Article

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