Carbon-containing Ti-C:H and Cr-C:H PVD hard coatings

Vacuum

Volumn 71, Issue 1-2 SPEC., 2003, Pages 261-265

  Panjan, P ^a   Cekada M ^a   Merl, D Kek ^a   Macek M ^a,b   Navinsek B ^a   Jesih, A ^a   Zalar, A ^c   Jenko, M ^d  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

^c Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

^d INSTITUTE OF METALS AND TECHNOLOGY   (Slovenia)

Author keywords

Diamond like carbon; Hard coatings; Reactive sputtering

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHROMIUM; SPUTTERING; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

HARD COATINGS;

COATINGS;

EID: 0037427437     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00748-0     Document Type: Conference Paper

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