SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 89, Issue 3, 1997, Pages 233-238

Substrate and coating damage by arcing during sputtering

(3) Mitterer, C c Heuze O a,c Derflinger, V H b,c

a UNIVERSITÉ DE RENNES 1 (France)

b Balzers AG (Liechtenstein)

c Institut fur Metallkunde und Werkstoffprufung (Austria)

Author keywords

Arcing; Coating defects; Coatings; PVD processes; Sputtering

Indexed keywords

ARGON; DEFECTS; ELECTRIC ARCS; ELECTRIC TRANSFORMERS; ETCHING; GLOW DISCHARGES; IMAGE ANALYSIS; OPTICAL MICROSCOPY; OPTIMIZATION; PRESSURE EFFECTS; SPUTTER DEPOSITION; SURFACE PROPERTIES;

ARCING; CURRENT VOLTAGE TRANSFORMERS; SURFACE DEFECT DENSITY;

PROTECTIVE COATINGS;

COATINGS; SPUTTERING;

EID: 0031104091 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(96)02908-8 Document Type: Article

Times cited : (29)

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