C-Ti nanocomposite thin films: Structure, mechanical and electrical properties

Vacuum

Volumn 82, Issue 2 SPEC. ISS., 2007, Pages 214-216

  Sedlackova K ^a,c   Ujvari T ^b   Grasin, R ^a   Lobotka, P ^c   Bertoti I ^b   Radnoczi G ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b CHEMICAL RESEARCH CENTER   (Hungary)

^c INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

Author keywords

Carbon nanocomposite; Hardness; Temperature dependence of resistivity; Transmission electron microscopy

Indexed keywords

HARDNESS; MAGNETRON SPUTTERING; OXIDATION; TRANSMISSION ELECTRON MICROSCOPY;

CARBON NANOCOMPOSITE; TEMPERATURE DEPENDENCE; THIN CARBON MATRIX;

THIN FILMS;

EID: 35248814257     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.055     Document Type: Article

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