Local growth of carbon nanotubes by thermal chemical vapor deposition from iron based precursor nanoparticles

2007 Spanish Conference on Electron Devices, Proceedings

Volumn , Issue , 2007, Pages 329-332

  Martin, I ^a   Rius, G ^a   Gabriel, G ^a   Esplandiu, M J ^a   Mestres, N ^a   Perez Murano, F ^a   Lora Tamayo, E ^a   Godignon, P ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

cvd; Local growth; Nanotubes; Selective deposition; SWCNT

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON BEAM LITHOGRAPHY; IRON; NANOPARTICLES; SEMICONDUCTOR GROWTH; THERMAL EFFECTS;

LOCAL GROWTH; SELECTIVE DEPOSITION;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 35148889215     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SCED.2007.384060     Document Type: Conference Paper

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