Model-assisted routing for improved lithography robustness

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6521, Issue , 2007, Pages

  Kong, Tim ^a   Leung, Hardy ^a   Raghavan, Vivek ^a   Wong, Alfred K ^a   Xu, Sarah ^a  

^a MAGMA DESIGN AUTOMATION   (United States)

Author keywords

DFM; Layout; Lithography; Routing

Indexed keywords

COMPUTATION THEORY; DESIGN AIDS; INTEGRATED CIRCUIT LAYOUT; NETWORK ROUTING; ROBUSTNESS (CONTROL SYSTEMS);

ACTUAL WEAK SPOTS; COMPUTATION INTENSIVE; MODEL-BASED ANALYSIS; WEAK SPOT ANALYSIS; WEAK SPOT IDENTIFICATION;

LITHOGRAPHY;

EID: 35148880265     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.717055     Document Type: Conference Paper

References (6)

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