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Volumn 6520, Issue PART 1, 2007, Pages

Advances in compute hardware platforms for computational lithography

Author keywords

Acceleration; Amdahl; Cell processor; Computational lithography; Compute farm; Field programmable gate array; High performance computing; Lithography verification; Optical proximity correction

Indexed keywords

CELL PROCESSORS; COMPUTATIONAL LITHOGRAPHY; COMPUTE FARMS; HIGH PERFORMANCE COMPUTINGS; LITHOGRAPHY VERIFICATION;

EID: 35148876105     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.712397     Document Type: Conference Paper
Times cited : (5)

References (8)
  • 1
    • 85060036181 scopus 로고
    • Validity of the single-processor approach to achieving large scale computing capabilities
    • Atlantic City, N.J, Apr. 18-20, AFIPS Press, Reston, Va
    • Amdahl, G.M. Validity of the single-processor approach to achieving large scale computing capabilities. In AFIPS Conference Proceedings vol. 30 (Atlantic City, N.J., Apr. 18-20). AFIPS Press, Reston, Va., 1967, pp. 483-485 (1967).
    • (1967) AFIPS Conference Proceedings , vol.30 , pp. 483-485
    • Amdahl, G.M.1
  • 2
    • 0037965888 scopus 로고    scopus 로고
    • An Effective Distributed Architecture for OPC & RET
    • Robert Lugg, Mathias Boman, Jim Burdorf Michael Rieger, "An Effective Distributed Architecture for OPC & RET", Proceedings of SPIE Vol. 4889 (2002).
    • (2002) Proceedings of SPIE , vol.4889
    • Lugg, R.1    Boman, M.2    Burdorf, J.3    Rieger, M.4
  • 3
    • 19844369833 scopus 로고    scopus 로고
    • Maurer, Word, J, Schulze, S., Shang, S., MEEF-based mask inspection Proc. SPIE 5567, 98 (2004).
    • Maurer, Word, J, Schulze, S., Shang, S., "MEEF-based mask inspection" Proc. SPIE 5567, 98 (2004).
  • 5
    • 25144470584 scopus 로고    scopus 로고
    • Optimized Hardware and Software for Fast, Full Chip Simulation
    • I. Y. Cao, Y.-W. Lu, L. Chen, J. Ye, "Optimized Hardware and Software for Fast, Full Chip Simulation," Proc. SPIE 5754, pp. 407-414, (2005).
    • (2005) Proc. SPIE , vol.5754 , pp. 407-414
    • Cao, I.Y.1    Lu, Y.-W.2    Chen, L.3    Ye, J.4
  • 6
    • 28544452916 scopus 로고    scopus 로고
    • Exploring New High Speed, Mask Aware RET Verification Flows
    • 2
    • 2. P. Martin , C.J. Progler, Y.-M. Ham, B. Kasprowicz, R. Gray, et al., "Exploring New High Speed, Mask Aware RET Verification Flows," Proc. SPIE 5853, p. 97, (2005).
    • (2005) Proc. SPIE , vol.5853 , pp. 97
    • Martin, P.1    Progler, C.J.2    Ham, Y.-M.3    Kasprowicz, B.4    Gray, R.5
  • 7
    • 33644591583 scopus 로고    scopus 로고
    • Optimal Distributed Computing Resources for Mask Synthesis and Tape-Out in Production Environment - An Economic Analysis
    • Chris Cork, Manoj Chacko, Shimon Levi, Ramat Gavriel, "Optimal Distributed Computing Resources for Mask Synthesis and Tape-Out in Production Environment - An Economic Analysis", Proc. of SPIE Vol. 5992 59924C-1 (2005).
    • (2005) Proc. of SPIE , vol.5992
    • Cork, C.1    Chacko, M.2    Levi, S.3    Gavriel, R.4
  • 8
    • 33846581986 scopus 로고    scopus 로고
    • Load balancing using DP management server for commercial MDP software
    • Jong-Won Kim, Won-Tai Ki, Sung-Hoon Jang Ji-Hyun Choi, Seong-Woon Choi and Woo-Sung Han, "Load balancing using DP management server for commercial MDP software," Proc. of SPIE Vol. 6349, 63493X, (2006).
    • (2006) Proc. of SPIE , vol.6349
    • Kim, J.1    Ki, W.2    Jang, S.3    Choi, J.4    Choi, S.5    Han, W.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.