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Volumn 6520, Issue PART 1, 2007, Pages
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Advances in compute hardware platforms for computational lithography
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Author keywords
Acceleration; Amdahl; Cell processor; Computational lithography; Compute farm; Field programmable gate array; High performance computing; Lithography verification; Optical proximity correction
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Indexed keywords
CELL PROCESSORS;
COMPUTATIONAL LITHOGRAPHY;
COMPUTE FARMS;
HIGH PERFORMANCE COMPUTINGS;
LITHOGRAPHY VERIFICATION;
ALGORITHMS;
COMPUTATION THEORY;
COMPUTER HARDWARE;
DENSITY (OPTICAL);
DIGITAL SIGNAL PROCESSORS;
FIELD PROGRAMMABLE GATE ARRAYS (FPGA);
PATTERN RECOGNITION;
LITHOGRAPHY;
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EID: 35148876105
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.712397 Document Type: Conference Paper |
Times cited : (5)
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References (8)
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