An effective distributed architecture for OPC & RET applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4889, Issue 2, 2002, Pages 903-908

  Lugg, Robert ^a   Boman, Mathias ^a   Burdorf, Jim ^a   Rieger, Michael ^a  

^a SYNOPSYS INC   (United States)

Author keywords

Distributed computing; Distributed processing; Mask data prep.; OPC; Optical proximity correction; Resolution enhancement technique; RET

Indexed keywords

COMMUNICATION; MASKS; PARALLEL PROCESSING SYSTEMS;

OPTICAL PROXIMITY CORRECTION;

INTEGRATED CIRCUIT LAYOUT;

EID: 0037965888     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.471300     Document Type: Conference Paper

References (4)

1. G. Amdahl, Validity of the single-processor approach to achieving large-scale computational capabilities, in AFIPS Conference Proceedings, Volume 30, page 483, AFIPS Press, 1967.
2. Anita Osterhaug, Guide to Parallel Programming on Sequent Computer Systems, Sequent Computer Systems, Inc., Beaverton, Oregon, 1986
3. J. Gustafson, "Reevaluating Amdahl's Law," Communications of the ACM, Volume 31, May 1988.
4. Stirniman, John P., Rieger, Michael L., "Fast proximity correction with zone sampling", Proc. SPIE Volume 2197, p. 294-301, Optical/Laser Microlithography VII, May 1994.