Ultraviolet nanoimprint lithography applicable to thin-film transistor liquid-crystal display

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6517, Issue PART 1, 2007, Pages

  Jeong, Jun Ho ^a   Kim, Ki Don ^a   Choi, Dae Geun ^a   Choi, Junhyuk ^a   Lee, Eung Sug ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Emerging lithography; Thin film transistor liquid crystal display; Ultraviolet nanoimprint process

Indexed keywords

LIQUID CRYSTAL DISPLAYS; QUARTZ; THIN FILM TRANSISTORS;

QUARTZ STAMPS; VACUUM ENVIRONMENT;

NANOIMPRINT LITHOGRAPHY;

LITHOGRAPHY; PRINTING; QUARTZ;

EID: 35148864018     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.712544     Document Type: Conference Paper

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