Electron optics for high throughput low energy electron microscopy

Surface Science

Volumn 601, Issue 20 SPEC. ISS., 2007, Pages 4733-4741

  Mankos, M ^a   Adler, D ^a   Veneklasen, L ^a   Munro, E ^b  

^a KLA TENCOR CORPORATION   (United States)

^b MEBS Ltd   (United Kingdom)

Author keywords

Electron optics; Insulating surfaces; Low energy electron microscopy; Magnetic films; Mirror electron microscopy; Photoelectron emission microscopy

Indexed keywords

ELECTRON GUNS; ELECTRON OPTICS; ELECTRONS; MAGNETIC FIELD EFFECTS; MAGNETIC FILMS; MAGNETIC FLUX;

INSULATING SURFACES; LOW ENERGY ELECTRON MICROSCOPY; MIRROR ELECTRON MICROSCOPY; PHOTOELECTRON EMISSION MICROSCOPY;

ELECTRON MICROSCOPY;

EID: 35148843232     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.05.062     Document Type: Article

References (14)

1. Telieps W., and Bauer E. Ultramicroscopy 17 (1985) 57
2. Tromp R.M., and Reuter M.C. Ultramicroscopy 50 (1993) 171
3. Jansen G.H. J. Appl. Phys. 84 (1998) 4549
4. Mkrtchyan M.M., Liddle J.A., Berger S.D., and Harriott L.R. J. Appl. Phys. 78 (1995) 6888
5. Mankos M., and Adler D. Ultramicroscopy 93 (2002) 347
6. Kolarik V., Venklasen L.H., and Mankos M. Optik 87 (1991) 1
7. R. Degenhardt, Ph.D. Dissertation, Technische Hochschule Darmstadt, 1992.
8. L.H. Veneklasen, D.L. Adler; US Patent # 6,586,733, July 1, 2003.
9. D.L. Adler, M. Marcus; US Patent # 6,979,819, December 27, 2005.
10. Mayer H. J. Appl. Phys. 28 (1957) 975
11. M. Mankos, D.A. Soltz, H.F. Hess, US Patent # 6,936,816, August 30, 2005.
12. Mankos M., Scheinfein M.R., and Cowley J.M. Adv. Imag. Elect. Phys. 98 (1996) 323
13. Scheinfein M.R., Unguris J., Kelley M.H., Pierce T., and Celotta R.J. Rev. Sci. Instrum. 61 (1990) 2501
14. Altman M.S., Pinkvos H., Hurst J., Poppa H., Marx G., and Bauer E. Mat. Res. Soc. Symp. Proc. 23 (1991) 125