Direct three dimensional nanoscale thermal lithography at high speeds using heated atomic force microscope cantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6517, Issue PART 1, 2007, Pages

  Hua, Yueming ^a   Saxena, Shubham ^b   Lee, Jung Chul ^b   King, William P ^b   Henderson, Clifford L ^a  

^a Georgia Institute of Technology   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

AFM; Decomposition; Heated cantilever; High speed; Nanolithography; Polymer; Three dimensional

Indexed keywords

CANTILEVERS; THERMAL LITHOGRAPHY;

ATOMIC FORCE MICROSCOPY; POLYMER FILMS; PYROLYSIS; THREE DIMENSIONAL;

NANOLITHOGRAPHY;

LITHOGRAPHY; PYROLYSIS;

EID: 35148823184     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.713374     Document Type: Conference Paper

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