Effect of hydrofluoric acid in oxidizing acid mixtures on the hydroxylation of silicon surface

Journal of the Electrochemical Society

Volumn 154, Issue 11, 2007, Pages

  Guhathakurta, Sanjukta ^a   Subramanian, Anuradha ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; DEIONIZED WATER; ELLIPSOMETRY; HYDROXYLATION; MIXTURES; SILICON;

DIFFUSE-REFLECTANCE INFRARED FOURIER TRANSFORM SPECTROSCOPY; HYDROXYL TERMINATION; SYNTHESIZED SURFACES;

HYDROFLUORIC ACID;

EID: 34848919873     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2779951     Document Type: Article

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