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Volumn 127, Issue 1, 2007, Pages 120-125

Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications

Author keywords

Mechanical properties; Micro and nanofiltration; Perforated membranes; Porous membranes

Indexed keywords

APPROXIMATION THEORY; ELASTIC MODULI; FINITE ELEMENT METHOD; MECHANICAL STABILITY; MICROMACHINING; NANOFILTRATION; POROUS SILICON; SILICON NITRIDE;

EID: 34848873502     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.07.044     Document Type: Article
Times cited : (25)

References (8)
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    • Yang, X.1    Yang, J.2    Thai, Y.3    Ho, C.4
  • 2
    • 34848904635 scopus 로고    scopus 로고
    • C.J.M. van Rijn, Nano and microengineered membrane technology, Elsevier, 2004, ISBN 0-444-51489-9.
  • 3
    • 22544448117 scopus 로고    scopus 로고
    • Fabrication and optimization of porous silicon substrates for diffusion membrane applications
    • Cruz S., Hönig-d'Orville A., and Müller J. Fabrication and optimization of porous silicon substrates for diffusion membrane applications. J. Electrochem. Soc. 152 6 (2005) C418-C424
    • (2005) J. Electrochem. Soc. , vol.152 , Issue.6
    • Cruz, S.1    Hönig-d'Orville, A.2    Müller, J.3
  • 4
    • 0037085622 scopus 로고    scopus 로고
    • Micro membrane reactor: a flow-through membrane for gas pre-combustion
    • Splinter A., Stürmann J., Bartels O., and Benecke W. Micro membrane reactor: a flow-through membrane for gas pre-combustion. Sens. Actuators B 83 (2002) 169-174
    • (2002) Sens. Actuators B , vol.83 , pp. 169-174
    • Splinter, A.1    Stürmann, J.2    Bartels, O.3    Benecke, W.4
  • 5
    • 0031098187 scopus 로고    scopus 로고
    • Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining
    • van Rijn C., van der Wekken M., Nijdam W., and Elwenspoek M. Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining. J. Microelectromech. Syst. 6 1 (1997) 48-54
    • (1997) J. Microelectromech. Syst. , vol.6 , Issue.1 , pp. 48-54
    • van Rijn, C.1    van der Wekken, M.2    Nijdam, W.3    Elwenspoek, M.4
  • 6
    • 84995969459 scopus 로고    scopus 로고
    • 3-D free-form manufacturing in silicon micro-free-form production for plastic moulding technology
    • Munich, Germany, October 5-6
    • Huster R., Kovacs A., and Mescheder U. 3-D free-form manufacturing in silicon micro-free-form production for plastic moulding technology. Proceedings of the MICRO SYSTEM Tech. Munich, Germany, October 5-6 (2005) 55-62
    • (2005) Proceedings of the MICRO SYSTEM Tech , pp. 55-62
    • Huster, R.1    Kovacs, A.2    Mescheder, U.3
  • 8
    • 34848839363 scopus 로고    scopus 로고
    • Large deflection analysis of perforated silicon nitride membranes
    • Budapest, Hungary, August 28-September 1 (CD Edition)
    • Kovács A., Vizváry Zs., Kovacs A., and Mescheder U. Large deflection analysis of perforated silicon nitride membranes. Proceedings of the 6th ESMC. Budapest, Hungary, August 28-September 1 (2006) (CD Edition)
    • (2006) Proceedings of the 6th ESMC
    • Kovács, A.1    Vizváry, Zs.2    Kovacs, A.3    Mescheder, U.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.