Plasma treatment on plastic substrates for liquid-phase-deposited SiO 2

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 5, 2007, Pages 1635-1639

  Yeh, Chih Chieh ^a   Lin, Yu Ju ^a   Lin, Shun Kuan ^a   Wang, Yeong Her ^a   Chung, Sheng Feng ^a   Huang, Li Ming ^a   Wen, Ten Chin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; GROWTH (MATERIALS); OXYGEN; PLASTICS; SCANNING ELECTRON MICROSCOPY; THIN FILM TRANSISTORS; X RAY PHOTOELECTRON SPECTROSCOPY;

INTERLAYERS; LIQUID PHASE DEPOSITION; PLASMA TREATMENT;

SILICA;

EID: 34648829842     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2778692     Document Type: Article

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