A low-voltage boostrapping technique for capacitive MEMS sensors interface

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn , Issue , 2007, Pages

  Jawed, S A ^a   Gottardi, M ^a   Massari, N ^a   Baschirotto, A ^b  

^a ITC IRST   (Italy)

^b UNIVERSITY OF SALENTO   (Italy)

Author keywords

Bootstrapping technique; Capacitive sensors; Sensor interface

Indexed keywords

BIAS VOLTAGE; FEEDBACK; MICROELECTROMECHANICAL DEVICES; RESISTORS; SENSORS; SIGNAL TO NOISE RATIO; SUBSTRATES;

BOOTSTRAPPING TECHNIQUES; CAPACITIVE SENSORS; SENSOR INTERFACES;

LOW NOISE AMPLIFIERS;

EID: 34648822422     PISSN: 10915281     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/imtc.2007.379384     Document Type: Conference Paper

References (6)

1. X.Li, and G.C.M.Meijer, "An accurate interface for capacitive sensors", IEEE Instrumentation and Measurement, vol.51, No.5, pp.935-939, October 2002.
2. A.Baschirotto, A. Gola, E. Chiesa, E. Lasalandra, F. Pasolini, M. Tronconi, and T. Ungaretti, "A ±1-g dual axis linear accelerometer in a standard 0.5μm CMOS technology for high sensitivity applications", IEEE J. Solid-Stute Circuits, vol.38, No.7, pp. 1292-1297, July 2003.
3. J. Wu, and L. R. Carley, "Electromechanical EA Modulation With High-Q Micromechanical Accelerometers and Pulse Density Modulated Force Feedback", IEEE Trans. on Circuits and Sysstems, vol.53, No.2, pp. 274-287, February 2006.
4. M.Lemkin, and B. E. Boser, "A three-axis michromachined accelerometer with a CMOS position-sense interface and a digital offset-trim electronics", IEEE J. Solid-State Circuits, vol.34, No.4, pp. 456-468, April 1999.
5. M. Pedersen, W. Olthuis, and P. Bergveld, "High-Performance Condenser Microphone with Fully Integrated CMOS Amplifier and DC-DC Voltage Converter", Journal of Microelectromechanical Systems, vol. 7, December 1998.
6. A. Faes, F. Giacomozzi, B. Margesin, and M. Zen, "Modeling of a condenser microphone with structured diaphragm", Proc. 9th Italian Conf. on Sensors and Microsystems, 2004.