A wireless LC chemical sensor based on a high quality factor EIS capacitor

Sensors and Actuators, B: Chemical

Volumn 126, Issue 2, 2007, Pages 648-654

  García Cantón, Jesús ^a   Merlos, Angel ^a   Baldi, Antonio ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Chemical sensor; EIS capacitor; LC sensor; Photoinjection; Wireless sensor

Indexed keywords

CAPACITORS; ELECTRIC INSULATORS; ELECTROLYTES; PH EFFECTS; SATURABLE CORE REACTORS; SILICON;

EIS CAPACITORS; LC SENSOR; PHOTOINJECTION; WIRELESS SENSORS;

CHEMICAL SENSORS;

EID: 34548612569     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.04.025     Document Type: Article

References (17)

1. Pandolfino J.E. Bravo capsule pH monitoring. Am. J. Gastroenterol. 100 (2005) 8-10
2. Buff W., Klett S., Rusko M., Ehrenpfordt J., and Goroli M. Passive remote sensing for temperature and pressure using SAW resonator devices. IEEE Trans. Ultrason., Ferroelectr. Freq. Control 45 (1998) 1388-1392
3. Cai Q.Y., and Grimes C.A. A remote query magnetoelastic pH sensor. Sens. Actuators B, Chem. 71 (2000) 112-117
4. Ong K.G., Grimes C.A., Robbins C.L., and Singh R.S. Design and application of a wireless, passive, resonant-circuit environmental monitoring sensor. Sens. Actuators A 93 (2001) 33-43
5. Fonseca M.A., English J.M., von Arx M., and Allen M.G. Wireless micromachined ceramic pressure sensor for high-temperature applications. J. Microelectromech. Syst. 11 (2002) 337-343
6. M. Lei, A. Baldi, T. Pan, Y. Gu, R.A. Siegel, B. Ziaie, A hydrogel-based wireless chemical sensor, MEMS'04 Technical Digest, Maastricht, The Netherlands, January 25-29, 2004.
7. Strong Z.A., Wang A.W., and McConaghy C.F. Hydrogel-actuated capacitive transducer for wireless biosensors. Biomed. Microdev. 4 (2002) 97-103
8. Garcia-Canton J., Merlos A., and Baldi A. High-quality factor electrolyte insulator silicon capacitor for wireless chemical sensing. IEEE Electr. Dev. Lett. 28 (2007) 27-29
9. Schöning M.J., Tsarouchas D., Beckers L., Schubert J., Zander W., Kordos P., and Lüth H. A highly long-term stable silicon-based pH sensor fabricated by pulsed laser deposition technique. Sens. Actuators B, Chem. 35 (1996) 228-233
10. Schöning M.J., Näther N., Auger V., Poghossian A., and Koudelka-Hep M. Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies. Sens. Actuators B, Chem. 108 (2005) 986-992
11. Harame D., Bousse L., Schott J., and Meindl J. Ion-sensing devices with silicon nitride and borosilicate glass insulators. IEEE Trans. Electr. Dev. 34 (1987) 1700-1706
12. Yoshinobu T., Ecken H., Poghossian A., Lüth H., Iwasaki H., and Schöning M.J. Alternative sensor materials for light-addressable potentiometric sensors. Sens. Actuators B, Chem. 76 (2001) 388-392
13. Pierret R.F. Field effect devices. Modular Series on Solid State Devices, vol. 4 (1983), Addison-Wesley Publishing Company, Reading p. 49
14. Bergveld P., and Sibbald A. Analytical and Biomedical Applications of Ion-selective Field-effect Transistors (1988), Elsevier, Amsterdam p. 13
15. Bousse L. Single electrode potentials related to flat-band voltage measurements on EOS and MOS structures. J. Chem. Phys. 76 (1982) 5128-5133
16. Kapoor V.J., and Turi R.A. Charge storage and distribution in the nitride layer of the metal-nitride-oxide-semiconductor structures. J. Appl. Phys. 52 (1981) 319-331
17. Alegret S., Bartroli J., Jimenez C., del Valle M., Dominguez C., Cabruja E., and Merlos A. pH-ISFET with NMOS Technology. Electroanalysis 3 (1991) 355-360