High-quality factor electrolyte insulator silicon capacitor for wireless chemical sensing

IEEE Electron Device Letters

Volumn 28, Issue 1, 2007, Pages 27-29

  Garcia Canton, J ^a   Merlos, A ^a   Baldi, Antoni ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Electrolyte insulator silicon (EIS) capacitor; LC wireless sensor; pH sensor; Photoinjection; SiO2 Si3N4 dielectric

Indexed keywords

CAPACITANCE; ELECTROLYTES; ELECTROLYTIC CAPACITORS; INDUCTANCE; PH SENSORS; RESONATORS; SATURABLE CORE REACTORS;

ELECTROLYTE INSULATOR SILICON CAPACITOR; PHOTOINJECTION; WIRELESS CHEMICAL SENSING;

ELECTROCHEMICAL SENSORS;

EID: 33846016609     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2006.888189     Document Type: Article

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