Study of structural, optical and electrical properties of ZnO and SnO2 thin films

Superlattices and Microstructures

Volumn 42, Issue 1-6, 2007, Pages 103-109

  Mukashev, B N ^a   Aimagambetov, A B ^a   Mukhamedshina, D M ^a   Beisenkhanov, N B ^a   Mit', K A ^a   Valitova, I V ^a   Dmitrieva, E A ^a  

^a INSTITUTE OF PHYSICS AND TECHNOLOGY   (Kazakhstan)

Author keywords

Microstructure; Reactive magnetron sputtering; Tin oxide; Zinc oxide

Indexed keywords

ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PHASE TRANSITIONS; POLYCRYSTALLINE MATERIALS; ZINC OXIDE;

FILM DEPOSITION; PHASE VOLUME; POLYCRYSTALLINE FILM;

THIN FILMS;

EID: 34548546718     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2007.04.057     Document Type: Article

References (7)

1. Ryzhikov A.S., Vasilev R.B., Rumyantseva M.N., Ryabova L.I., Dosovitsky G.A., Gilmutdinov A.M., Kazlovsky V.F., and Gaskov A.M. Mater. Sci. Eng. B96 (2002) 268
2. Bakin A.S., Bestaev M.V., Dimitrov D.Tz., Moshnikov V.A., and Tairov Yu.M. Thin Solid Films 296 (1997) 168
3. Chaonan X., Jun T., Norio M., and Noboru Y. Sensor. Actuator. B3 (1991) 147
4. Karapatnitski I.A., Mit' K.A., Mukhamedshina D.M., and Beisenkhanov N.B. Surface and Coatings Technology 151-152 (2002) 76
5. Morrison S.R. Semiconductor gas sensors. Sensor. Actuator. 2 (1982) 329
6. Kissine V.V., Sysoev V.V., Voroshilov S.A., and Simakov V.V. Semiconductors 34 (2000) 308
7. Mukashev B.N., Tokmoldin S.Zh., Beisenkhanov N.B., Kikkarin S.M., Valitova I.V., Glazman V.B., Aimagambetov A.B., Dmitrieva E.A., and Veremenithev B.M. Mater. Sci. Eng. B118 (2005) 1-3 164