Periodically structured ZnO thin films for optical gas sensor application

Sensors and Actuators, A: Physical

Volumn 140, Issue 1, 2007, Pages 19-23

  Dikovska, Anna Og ^a   Atanasov, Petar A ^b   Tonchev, Svetlen ^b   Ferreira, João ^c   Escoubas, Ludovic ^c  

^a INSTITUTE OF ELECTRONICS   (Bulgaria)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^c Ecole Centrale Marseille   (France)

Author keywords

Optical butane sensor; Periodically structured waveguide; ZnO film

Indexed keywords

CHEMICAL SENSORS; FILM GROWTH; FILM THICKNESS; LITHOGRAPHY; OPTICAL SENSORS; PERIODIC STRUCTURES; PULSED LASER DEPOSITION; THIN FILMS;

HOLOGRAPHIC EXPOSURE; OPTICAL BUTANE SENSORS; OPTICAL GAS SENSORS; PERIODICALLY STRUCTURED WAVEGUIDES;

ZINC OXIDE;

EID: 34548514623     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.05.032     Document Type: Article

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