Passivation of a Si(100) surface by S from solution

Electrochemical and Solid-State Letters

Volumn 10, Issue 11, 2007, Pages 317-320

  Ali, M Yusuf ^a   Tao, Meng ^a,b  

^a The University of Texas at Arlington   (United States)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; PASSIVATION; SCHOTTKY BARRIER DIODES; SENSITIVITY ANALYSIS; SILICA; WET ETCHING;

COMPATIBILITY; ETCHANTS; WET-CHEMICAL PROCESS;

SURFACES;

EID: 34548483145     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2771079     Document Type: Article

References (14)

1. V. N. Bessolov and M. V. Lebedev, Semiconductors 1063-7826 10.1134/1.1187580, 32, 1141 (1998).
2. G. W. Anderson, M. C. Hanf, P. R. Norton, Z. H. Lu, and M. J. Graham, Appl. Phys. Lett. 0003-6951 10.1063/1.113833, 66, 1123 (1995).
3. M. Tao, D. Udeshi, N. Basit, E. Maldonado, and W. P. Kirk, Appl. Phys. Lett. 0003-6951 10.1063/1.1559418, 82, 1559 (2003).
4. M. Tao, S. Agarwal, D. Udeshi, N. Basit, E. Maldonado, and W. P. Kirk, Appl. Phys. Lett. 0003-6951 10.1063/1.1613357, 83, 2593 (2003).
5. E. Kaxiras, Phys. Rev. B 0163-1829 10.1103/PhysRevB.43.6824, 43, 6824 (1991).
6. J. Bardeen, Phys. Rev. 0031-899X 10.1103/PhysRev.71.717, 71, 717 (1947).
7. C. J. Sandroff, R. N. Nottenburg, J. C. Bischoff, and R. Bhat, Appl. Phys. Lett. 0003-6951 10.1063/1.98877, 51, 33 (1987).
8. G. Gould and E. A. Irene, J. Electrochem. Soc. 0013-4651 10.1149/1.2096794, 136, 1108 (1989).
9. E. Yablonovitch, C. J. Sandroff, R. Bhat, and T. Gmitter, Appl. Phys. Lett. 0003-6951 10.1063/1.98415, 51, 439 (1987).
10. J. G. Zhu, M. P. Nadesalingam, A. H. Weiss, and M. Tao, J. Appl. Phys. 0021-8979 10.1063/1.1897488, 97, 103510 (2005).
11. E. H. Rhoderick and R. H. Williams, Metal-Semiconductor Contacts, 2nd ed., Clarendon Press, Oxford (1988).
12. S. M. Sze, Physics of Semiconductor Devices, 2nd ed., Wiley, New York (1981).
13. K. Chino, Solid-State Electron. 0038-1101 10.1016/0038-1101(73)90132-9, 16, 119 (1973).
14. H. B. Michaelson, J. Appl. Phys. 0021-8979 10.1063/1.323539, 48, 4729 (1977).