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Volumn 51, Issue 2 PART I, 2007, Pages 710-714

Characterization of polycrystalline SrRuO3 thin films deposited by DC magnetron sputtering method

Author keywords

Buffer electrode; Ferroelectric capacitor; Oxide conductor; PZT; Resistivity

Indexed keywords


EID: 34548361677     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.51.710     Document Type: Article
Times cited : (5)

References (12)
  • 5
    • 34548366087 scopus 로고    scopus 로고
    • D. C. Yoo, B. J. Bae, J. E. Lim, D. H. Im, S. O. Park, H. S. Kim, U. In. Chung, J. T. Moon and B. I. Ryu, VLSI Tech. Dig., 100 (2005).
    • D. C. Yoo, B. J. Bae, J. E. Lim, D. H. Im, S. O. Park, H. S. Kim, U. In. Chung, J. T. Moon and B. I. Ryu, VLSI Tech. Dig., 100 (2005).
  • 8
    • 21544457860 scopus 로고    scopus 로고
    • X. D. Wu, S. FL Foltyn, R. C. Dye, Y. Coulter and FL E. Muenchausen, Appl. Phys. Lett. 62, 2434 (1993).
    • X. D. Wu, S. FL Foltyn, R. C. Dye, Y. Coulter and FL E. Muenchausen, Appl. Phys. Lett. 62, 2434 (1993).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.