Synchrotron-radiation computed laminography for high-resolution three-dimensional imaging of flat devices

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 8, 2007, Pages 2760-2765

  Helfen, Lukas ^a,b   Myagotin, Anton ^a   Rack, Alexander ^a   Pernot, Petra ^a,c   Mikulík, Petr ^d   Di Michiel, Marco ^c   Baumbach, Tilo ^a,b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF KARLSRUHE   (Germany)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^d MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTED LAMINOGRAPHY; REGIONS OF INTEREST (ROI); X-RAY TRANSMISSION;

COMPUTERIZED TOMOGRAPHY; MICROSYSTEMS; SYNCHROTRON RADIATION;

IMAGING SYSTEMS;

EID: 34548288936     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200775676     Document Type: Article

References (12)

1. C. Schroer, M. Meyer, M. Kuhlmann, B. Benner, T. Günzler, B. Lengeler, C. Rau, T. Weitkamp, A. Snigirev, and I. Snigireva, Appl. Phys. Lett. 81, 1527-1529 (2002).
2. M. Stampanoni, G. Borchert, R. Abela, and P. Rüegsegger, Appl. Phys. Lett. 82, 2922-2924 (2003).
3. L. Helfen, T. Baumbach, P. Mikulík, D. Kiel, P. Pernot, P. Cloetens, and J. Baruchel, Appl. Phys. Lett. 86, 071915 (2005).
4. K. A. Nugent, T. E. Gureyev, D. F. Cookson, D. Paganin, and Z. Barnea, Phys. Rev. Lett. 77, 2961-2964 (1996).
5. P. Cloetens, W. Ludwig, J. Baruchel, D. van Dyck, J. van Landuyt, J. Guigay, and M. Schlenker, Appl. Phys. Lett. 75, 2912 (1999).
6. T. E. Gureyev, C. Raven, A. Snigirev, I. Snigireva, and S. W. Wilkins, J. Phys. D 32, 563-567 (1999).
7. B. G. Ziedses des Plantes, Acta Radiol. 13, 182-192 (1932).
8. J. T. Dobbins III and D. J. Godfrey, Phys. Med. Biol. 48, R65-R106 (2003).
9. G. Lauritsch and W. H. Härer, Proc. SPIE 3338, 1127-1137 (1999).
10. J. Zhou, M. Maisl, H. Reiter, and W. Arnold, Appl. Phys. Lett. 68(24), 3500-3502 (1996).
11. S. Gondrom, J. Zhou, M. Maisl, H. Reiter, M. Kröning, and W. Arnold, Nucl. Eng. Des. 190, 141-147 (1999).
12. L. Helfen, A. Myagotin, P. Pernot, M. DiMichiel, P. Mikulík, A. Berthold, and T. Baumbach, Nucl. Instrum. Methods A 563, 163-166 (2006).