Nanofabrication of solid surface using probe oxidation

Microsystem Technologies

Volumn 13, Issue 8-10, 2007, Pages 1219-1225

  Fukuzawa, Kenji ^a,b   Deguchi, Takanori ^a   Muramatsu, Takuro ^a   Zhang, Hedong ^a   Mitsuya, Yasunaga ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ELECTROCHEMISTRY; MICROFABRICATION; NANOTECHNOLOGY; OXIDATION; TRIBOLOGY;

APPLIED VOLTAGE; FABRICATION CONDITIONS; NANOMECHANICAL DEVICES; PROBE OXIDATION; SOLID SURFACES;

SURFACES;

EID: 34548242631     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0334-5     Document Type: Conference Paper

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