Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 31, Issue 1, 2006, Pages 1-4

  Qian, Kaiyou ^a   Chen, Ting ^b   Yan, Bingyong ^a   Lin, Yangkui ^a   Xu, Dong ^a   Sun, Zhuo ^b   Cai, Bingchu ^a  

^a Shanghai Jiao Tong University   (China)

^b EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

Carbon nanotubes; Pressure sensors; Vacuum microelectronics

Indexed keywords

ACCELEROMETERS; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; ELECTROMAGNETIC WAVE EMISSION; ELECTRON SOURCES; MICROELECTRONICS; MICROSENSORS; PRESSURE EFFECTS; VACUUM APPLICATIONS;

CARBON NANOTUBES ARRAYS; MULTI-WALL CARBON NANOTUBES (MWNTS) ARRAYS CATHODE; PRESSURE SENSORS; VACUUM MICROELECTRONICS;

SENSORS;

EID: 29644433835     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2005.07.016     Document Type: Article

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