Characterization of electrical fields of buried interdigitated nanoscale Ti-electrode arrays by a novel atomic force microscopy measurement procedure and their fabrication by FIB milling

2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings

Volumn 4, Issue , 2007, Pages 97-100

  Jenke, M G ^a,b   Santschi, Ch ^a,b   Hoffmann, P ^a,b  

^a EPFL   (Switzerland)

^b BM 4111 ^*

Author keywords

AFM; Electrostatic force field; Force distance curves; Interdigitated nanoelectrodes; SFM

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC FIELDS; ELECTRODES; ETCHING; FOCUSED ION BEAMS; TITANIUM;

ELECTROSTATIC FORCE FIELD; FORCE DISTANCE CURVES; INTERDIGITATED NANOELECTRODES; NANOELECTRODES; SECONDARY ELECTRON MICROSCOPY (SEM);

NANOSTRUCTURED MATERIALS;

EID: 34547964190     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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