Fabrication and test of PECVD SiC resonator

Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007

Volumn A, Issue , 2007, Pages 455-458

  Wang, Yu ^a   Guo, Hui ^a   Zhang, Haixia ^a   Zhang, Guobing ^a   Li, Zhihong ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS CONTACT; FREQUENCY AMPLITUDE; PECVD SIC RESONATORS; SIC THIN FILMS;

ANNEALING; DOPING (ADDITIVES); LOW TEMPERATURE OPERATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON CARBIDE; THIN FILMS;

RESONATORS;

EID: 34547943833     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/MNC2007-21240     Document Type: Conference Paper

References (5)

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2. Wu C H, Zorman C A and Mehregany M, Characterization of Polycrystalline SiC Grown on SiO2 and Si3N4 by APCVD for MEMS Applications, Material Science Forum, 2000, 541:338-342
3. Mehran Mehregany and Christian A. Zorman, SiC MEMS: opportunities and challenges for applications in harsh environments, Thin Solid Film 3555-356, (1999), pp. 518-524.
4. Xiaodong Hu, Dachao Li, Tong Guo, Cuiyun Jin, Chunguang Hu, Xiaotang Hu, The optical testing platform of Microstructures properties, Journal of Optics(Chinese), 2005, 25(6), 803-808
5. Robert F. Wiser, Christian A. Zorman and Mehran Mehregany, Fabrication and testing of vertically-actuated polycrystalline SiC micromechanical resonators for MHz frequency application, Transducers'03, Boston, June 2003, pp. 1164-1167.