Investigation of micro solid immersion lens mounting systems

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 6 B, 2007, Pages 3737-3740

  Lang, Matthew ^a   Milster, Tom D ^a   Minamitani, Takahisa ^b   Borek, Gregg ^b  

^a UNIVERSITY OF ARIZONA   (United States)

^b MEMS Optical Incorporated   (United States)

Author keywords

Gallium phosphide; Lithography; Micro optics; Solid immersion lens

Indexed keywords

GALLIUM PHOSPHIDE; LITHOGRAPHY; NUMERICAL METHODS; OPTICAL DESIGN; REFRACTIVE INDEX;

SOLID IMMERSION LENSES;

OPTICAL SYSTEMS;

EID: 34547922051     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.3737     Document Type: Article

References (9)

1. F. Zijp, J. Lee, C. Verschuren, J. van den Eerenbeemd, and D. Bruls: Jpn. J. Appl. Phys. 45 (2006) 1336.
2. M. Shinoda, K. Saito, T. Kondo, A. Nakaoki, M. Furuki, M. Takeda, M. Yamamoto, T. Schaich, B. Van Oerle, H. Godfried, P. Kriele, E. Houwman, W. Nelissen, G. Pels, and P. Spaaij: Jpn. J. Appl. Phys. 45 (2006) 1311.
3. Q. Wu, G. Feke, R. Grober, and L. Ghislain: Appl. Phys. Lett. 75 (1999) 4064.
4. M. Lang, T. Milster, T. Minamitani, G. Borek, and D. Brown: Jpn. J. Appl. Phys. 44 (2005) 3385.
5. D. C. O'Shea: Appl. Opt. 33 (1994) 8124.
6. R. Brunner, J. Bischoff, K. Rudolf, and M. Ferstl: Proc. SPIE 4449 (2001) 235.
7. S. Audran, B. Faure, B. Mortini, C. Aumont, R. Tiron, C. Zinck, Y. Sanchez, C. Fellous, J. Regolini, JP. Reynard, G. Schlatter, and G. Hadziioannou: Proc. SPIE 6153 (2006) 61534D.
8. I. Ichimura, K. Kishima, K. Osato, K. Yamamoto, Y. Kuroda, and K. Saito: Jpn. J. Appl. Phys. 39 (2000) 962.
9. T. Milster: Jpn. J. Appl. Phys. 38 (1999) 1777.