Fabrication and characterization of sub-100 μm diameter gallium phosphide solid immersion lens arrays

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 B, 2005, Pages 3385-3387

  Lang, Matthew ^a   Milster, Tom D ^a   Minamitani, Takahisa ^b   Borek, Gregg ^b   Brown, David ^b  

^a UNIVERSITY OF ARIZONA   (United States)

^b MEMS Optical Incorporated   (United States)

Author keywords

Gallium phosphide; Lithography; Phase shifting interferometry; Solid immersion lens

Indexed keywords

ARRAYS; CHARGE COUPLED DEVICES; DATA STORAGE EQUIPMENT; ETCHING; GALLIUM COMPOUNDS; INDUCTIVELY COUPLED PLASMA; INTERFEROMETRY; LIGHT EMITTING DIODES; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; PHASE SHIFT; PHOTORESISTS; PIEZOELECTRIC TRANSDUCERS;

GALLIUM PHOSPHIDE; PHASE-SHIFTING INTERFEROMETRY; SOLID IMMERSION LENSES (SIL); SURFACE PROFILE;

LENSES;

EID: 23144461224     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3385     Document Type: Conference Paper

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