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Volumn 579, Issue 3, 2007, Pages 1081-1089
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Analysis of artificial silicon microstructures by ultra-small-angle and spin-echo small-angle neutron scattering
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Author keywords
Neutron instrumentation; Neutron optics; Reconstruction; SESANS; USANS
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Indexed keywords
ANISOTROPIC ETCHING;
DIFFRACTION GRATINGS;
SIGNAL ANALYSIS;
SILICON COMPOUNDS;
SPIN DYNAMICS;
NEUTRON INSTRUMENTATION;
NEUTRON OPTICS;
SESANS;
USANS;
NEUTRON SCATTERING;
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EID: 34547841276
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nima.2007.06.008 Document Type: Article |
Times cited : (8)
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References (24)
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