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Volumn 579, Issue 3, 2007, Pages 1081-1089

Analysis of artificial silicon microstructures by ultra-small-angle and spin-echo small-angle neutron scattering

Author keywords

Neutron instrumentation; Neutron optics; Reconstruction; SESANS; USANS

Indexed keywords

ANISOTROPIC ETCHING; DIFFRACTION GRATINGS; SIGNAL ANALYSIS; SILICON COMPOUNDS; SPIN DYNAMICS;

EID: 34547841276     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2007.06.008     Document Type: Article
Times cited : (8)

References (24)
  • 14
    • 34547845402 scopus 로고    scopus 로고
    • M. Trinker, Annual Report of The Austrian Society for Micro- and Nanoelectronics, 2003, p. 125.
  • 17


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.