Detecting real oxygen ions in polycrystalline diamond thin film using secondary ion mass spectrometry

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 6 A, 2007, Pages 3391-3393

  Nakagawa, Tsubasa ^a   Sakaguchi, Isao ^b   Haneda, Hajime ^b   Ohashi, Naoki ^b   Ikuhara, Yuichi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Chemical vapor deposition; Diamond; Oxygen; Secondary ion mass spectrometry

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; OXYGEN; POLYCRYSTALLINE MATERIALS; SECONDARY ION MASS SPECTROMETRY; THIN FILMS;

DIAMOND THIN FILM; OXYGEN IONS;

DIAMOND FILMS;

EID: 34547828852     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.3391     Document Type: Article

References (16)

1. J. J. Cuomo, R. J. Gambino, J. M. E. Harper, and J. D. Kuptsis: J. Vac. Sci. Technol. 15 (1978) 281.
2. A. Ruzin, G. Casse, M. Glaser, and F. Lemeilleur: Nucl. Instrum. Methods Phys. Res., Sect. A 426 (1999) 94.
3. J. C. Mikkelsen, Jr: Appl. Phys. Lett. 41 (1982) 871.
4. J. Ristein: Science 313 (2006) 1057.
5. T. Ando, K. Yamamoto, M. Ishii, M. Kamo, and Y. Sato: Faraday Trans. 19 (1993) 3635.
6. H. Kawarada: Surf. Sci. Rep. 26 (1996) 205.
7. H. Kawarada, T. Tsutsumi, H. Hirayama, and A. Hamaguchi: Appl. Phys. Lett. 64 (1994) 451.
8. I. Sakaguchi, M. N. Gamo, K. P. Loh, H. Haneda, S. Hishita, and T. Ando: Appl. Phys. Lett. 71 (1997) 629.
9. W. A. Weimer, F. M. Cerio, and C. E. Johnson: J. Mater. Res. 6 (1991) 2134.
10. Y. Liou, A. Inspektor, R. Weimer, and R. Messier: Appl. Phys. Lett. 55 (1989) 631.
11. H. A. Storms, K. F. Brown, and J. D. Stein: Anal. Chem. 49 (1977) 2023.
12. I. Sakaguchi: Jpn. J. Appl. Phys. 45 (2006) 6398.
13. A. Bergmaier, M. Schreck, G. Dollinger, O. Schmelmer, K. H. Thuerer, and B. Stritzker: Diamond Relat. Mater. 8 (1999) 1142.
14. K. P. Loh, X. N. Xie, X. Zhang, E. J. Teo, T. Osipowicz, M. Y. Lai, and N. Yakovleva: Diamond Relat. Mater. 11 (2002) 1385.
15. G. Dollinger, A. Bergmaier, C. M. Frey, M. Roesler, and H. Verhoeven: Diamond Relat. Mater. 4 (1995) 591.
16. J. Stiegler, A. Bergmaier, J. Michler, Y. von Kaenel, G. Dollinger, and E. Blank: Diamond Relat. Mater. 7 (1998) 193.