Operation and testing of electrostatic microactuators and micromachined sound detectors for active control of high speed flows

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 81-86

  Huang, C ^a   Najafi, K ^a   Alnajjar, E ^a   Christophorou, C ^a   Naguib, A ^a   Nagib, H M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DEVICES; ACTUATORS; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; ELECTROSTATIC DEVICES; FLOW CONTROL; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES;

ELECTROSTATIC MICROACTUATORS; JET SCREECH; MICROMACHINED SOUND DETECTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031682454     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)